a. Laser source: 635 nm, 100 mW with bandpass filters.
b. Measurement sample size: 200 mm (standard 100 mm up to 200 mm maximum).
c. Computer controller for excitation wavelength change.
d. Measurement speed : 8 minitues for 4" samples (GaInP sample type, 1 mm step size, Lamda/Peak/FWHM measurement).
e. Integrated excitation light source.
f. Spot size: < 100 um.
g. Wavelength range: 300-1100 nm.
h. Can measure 4" circular and rectangle samples (maximum).
i. Detector: Si CCD array detector.
|Optical Fiber Guiders||
a. Multi-mode Optical Fiber with AR Coating Aspheric for PL signal from 300-2200 nm (efficiency~75%).
a. Archromatic focusing optics for excitation wavelength (>250 nm ) .
b. Long Working Distance Focusing optics for 532 nm.
c. Broadband and high reflectance optics PL signal (From300 nm to 2000 nm)
d. White light source illumination and sample alignment.
e. 5 Mega pixels camera for sample Image and monitoring system.
f. Automatic filer wheel for black excitation wavelength (with Longpass filters 350 nm).
|Sample Size and Mapping System||
a. Sample size: 200 mm maximum (standard 100 mm to 200 mm maximum).
b. Can do the mapping measurement for 4" circular and rectangle sample4.
c. Linear slide, resolution ≦1 um.
d. Double Axis Stage Controller.
e. Z axis manual stage adjustable,±5 mm working distance, resolution: 10 um.
f. 7L/min vacuum pump.
g. High-efficient condenser.
h. Shield box.
i. Three adapters for 2-inch and 6-inch and 26.5 x 26.5 mm samples.
|Photoluminescence Measurement Sytem||
a. Wavelength range：300-1100 nm
b. Sensitivity: >450,000 counts/uW
c. Detector type：2048 back-illuminated Si CCD detector，QE=78%
d. Noise Ratio: 450:1
e. Dark Noise (counts RMS): 17
f. Dynamic range: 3800
g. 16 bit A/D
h. PRNU: ±3%
i. Integration time：2us ~20 sec
b. Can measure single EL spectrum (the software is euqipped with controller for source meter, customers need to prepare the source meter)
b. Can do the arbitrary multipoint electroluminescence spectroscopy measurement automatically in the scanning range of 200 mm x 200 mm. (can integrate with source meter, customers need to prepare the source meter).
b. Can do the 2D or 3D drawing based on the scanning result.
c. Can output the measurement result into TXT, CVS and JPC file.
b. Scanning range for LBIC:200mm x 200mm.
c. Can do the 2D or 3D drawing based on the scanning result.
d. Light intensity analysis, wavelength location analysis, FWHM mapping analysis.
e. Measurement report.
f. Recipe edition function.
g. 2D and 3D drawing function.
a. Computer and LCD with windows system, english version.
b. Fast mapping method and algorithm approach.
c. Multi excitation wavelength capability.